How to solve mod_fcgid: can't apply process slot ?

mod_fcgid: can't apply process slot for varwwwcgi-bincgi_wrapper mod_fcgid_ can't apply process slot for _var_www_cgibin_cgi_wrapper_cgi_wrapper
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mod_fcgid_ can''t apply process slot Log kayıtlarında aşağıdaki hatayı alıyorum mod_fcgid: can't apply process slot for varwwwcgi-bincgi_wrappercgi_wrapper Bu sorunu